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Abstract Thinning silicon wafers via wet etching is a common practice in the microelectromechanical system (MEMS) industry to produce membranes and other structures Wang (Nano Lett 13(9): 4393–4398, 2013). Controlling the thickness of a membrane is a critical aspect to optimize the functionality of these devices. Our research specifically focuses on the production of bio-membranes for lung-on-a-chip (LoaC) applications. In our fabrication, it is crucial for us to determine the membranes’ thickness in a non-invasive way. This study aims to address this issue by attempting to develop a tool that uses the optical properties of light transmission through silicon to find a correlation with thickness. To find this correlation, we conducted a small experimental study where we fabricated ultra-thin membranes and captured images of the light transmission through these samples. This paper will report the correlation found between calculated average intensities of these images and measurements done using scanning electron microscopy (SEM). Graphical abstract 

Abstract In the last decade, organ-on-a-chip technology has been researched as an alternative to animal and cell culture models (Buhidma et al. in NPJ Parkinson’s Dis, 2020; Pearce et al. in Eur Cells Mater 13:1–10, 2007; Huh et al. in Nat Protoc 8:2135–2157, 2013). While extensive research has focused on the biological functions of these chips, there has been limited exploration of functional materials that can accurately replicate the biological environment. Our group concentrated on a lung-on-a-chip featuring a newly fabricated porous silicon bio-membrane. This bio-membrane mimics the interstitial space found between epithelial and endothelial cells in vivo, with a thickness of approximately 1 μm (Ingber in Cell 164:1105–1109, 2016). This study aims to establish a fabrication method for producing a thin, uniform porous silicon membrane with a predictablereduced modulus. We conducted mechanical and morphological characterization using scanning electron microscopy and nanoindentation. A small, parametric study was conducted to determine the reduced modulus of the porous silicon and how it may relate to the morphological features of the membrane. We compare our results to other works. Graphical Abstract